Etching Film Forming Equipment×プラズマ・サーモ・ジャパン - メーカー・企業と製品の一覧

Ion Beam Etching and Deposition Device 'QuaZar(TM)'

Achieving high throughput! Large-area ion source and advanced motion control.

We would like to introduce our ion beam etching and deposition system, 'QuaZar(TM)'. With a large-area ion source and advanced motion control, it achieves high throughput. In particular, the Marathon(TM) grid allows for excellent uniformity over a long period compared to conventional methods. 【Specifications】 ■ Ion beam system ■ Process temperature: -40℃ to +60℃ ■ Tilt angle: +90 degrees to -80 degrees ■ Load lock or CtoC ■ Wafer sizes: 100mm, 150mm, 200mm * You can download the English version of the catalog. * For more details, please refer to the PDF document or feel free to contact us.

企業：プラズマ・サーモ・ジャパン
価格：Other

Etching Equipment

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Ion Beam Etching and Deposition Equipment 'QuaZar'

It is possible to reduce total ownership costs! Achieving top-class uniformity and throughput.

"QuaZar" is an etching and deposition device that achieves process results in challenging etching processes and thin film formation applications through a large-area ion source and advanced motion control. The Marathon grids technology of this product is a key element and can be installed in your existing systems. Many customers around the world have successfully improved the performance of their existing equipment with grid technology, extending its lifespan by more than double. 【Features】 ■ Uniformity <2% 3σ (200mm wafer), with scanning motion achieving <0.6% 3σ ■ Ion Source, Marathon Grid, and Dual PBN have doubled the MTBM compared to conventional systems and can be equipped on existing devices from other manufacturers ■ Clustering with our PVD, CVD, etc. is possible ■ 150mm, 200mm *For more details, please feel free to contact us.

企業：プラズマ・サーモ・ジャパン
価格：Other

Etching Equipment

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録

Tabletop Type Etching and Film Deposition Device 'Plasma POD Series'

For educational institutions and small facilities! A desktop system that allows for easy operation with a touch panel.

The "Plasma POD Series" is a small and compact tabletop etching and deposition device. It is recommended for those who have limited installation space and are considering the introduction of an etching and deposition device at a low cost. Please feel free to contact us if you have any inquiries. 【Features】 ■ Maximum device size: 80cm x 80cm x 80cm (height) ■ Easy operation with a touch panel * You can download the English version of the catalog. * For more details, please feel free to contact us.

企業：プラズマ・サーモ・ジャパン
価格：Other

Etching Equipment

ブックマークに追加いたしました

ブックマーク一覧

ブックマークを削除いたしました

ブックマーク一覧

これ以上ブックマークできません

会員登録すると、ブックマークできる件数が増えて、ラベルをつけて整理することもできます

無料会員登録

Etching Film Forming Equipment×プラズマ・サーモ・ジャパン - メーカー・企業と製品の一覧

Etching Film Forming Equipmentの製品一覧

Ion Beam Etching and Deposition Device 'QuaZar(TM)'

Ion Beam Etching and Deposition Equipment 'QuaZar'

Tabletop Type Etching and Film Deposition Device 'Plasma POD Series'